| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c5397fc5ff75ee49a454558b68b36baa |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2014
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03B27-58
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03B27-60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03B27-64
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03B27-62 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03B27-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03B27-02 |
| filingDate |
2006-10-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2010-11-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3ce6414910f2214bc8d5c3509b737b54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_86549b2d09eac7d958d24dd34f41a1cb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_36949f77f4719362a93d603b2e0d12e2 |
| publicationDate |
2010-11-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7830498-B2 |
| titleOfInvention |
Hydraulic-facilitated contact lithography apparatus, system and method |
| abstract |
A contact lithography apparatus, system and method use a hydraulic deformation to facilitate pattern transfer. The apparatus, system and method include a spacer that provides a spaced apart proximal orientation of lithographic elements, and a hydraulic force member that provides the hydraulic deformation. One or more of the lithographic elements and the spacer is deformable, such that hydraulic deformation thereof facilitates the pattern transfer. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013264746-A1 |
| priorityDate |
2006-10-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |