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inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_07276f8f90205921ca81505464ece29f
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publicationDate 2010-10-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-7811978-B2
titleOfInvention Fluorinated sulfonamide surfactants for aqueous cleaning solutions
abstract Described are anionic N-substituted fluorinated sulfonamide surfactants, and use thereof in cleaning and in acid etch solutions. The cleaning and etch solutions are used with a wide variety of substrates, for example, in the cleaning and etching of silicon oxide-containing substrates.
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