http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7799512-B2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b2d32a1324eb3a240649ffee8d475d63 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31144 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0337 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-26 |
| filingDate | 2007-04-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2010-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6b1dd2be2cf235f80fc10d90c1e975db http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_24ee54debb631e3eaf3b8d68eea06a4c |
| publicationDate | 2010-09-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-7799512-B2 |
| titleOfInvention | Method for forming ring pattern |
| abstract | A method for forming a ring pattern is disclosed. The ring pattern has a first wall and a second wall. The method includes the following steps: (a) providing a substrate; (b) forming a dielectric layer on the substrate; (c) forming a first patterned photoresist layer on the dielectric layer, the first patterned photoresist layer defining the first wall; (d) etching the dielectric layer to a predetermined depth by using the first patterned photoresist as a mask, and then removing the first patterned photoresist layer; (e) forming a second patterned photoresist layer on the dielectric layer, the second patterned photoresist layer defining the second wall; (f) etching the dielectric layer by using the second patterned photoresist layer as a mask so as to form the ring pattern having the first wall and the second wall. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10832910-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10312086-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9786504-B1 |
| priorityDate | 2007-02-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 21.