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filingDate 2007-09-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2010-09-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-7795778-B2
titleOfInvention Electrostatic actuator driving system having plural actuators and a temperature detector
abstract An actuator of the present invention includes a moving part, and a driving electrode which is comprised of electrode parts electrically isolated from each other and drives the moving part. A drive voltage is applied selectively to some of the electrode parts to control an electrostatic force which acts on the moving part.
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