| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01H59-0009
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B69-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G11C11-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-49105
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-105 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B99-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-10 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G11C11-50 |
| filingDate |
2008-03-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2010-09-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2cc95d38c0e305b771747f0c63d04209
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9d3461654f21f25f9c8f5bc6762a4fe9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b116d14dd6660a4aa1394ec5ea28c72c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cefa36d1ebe174942848920f0236175b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c34f70c3013e3f7bcc7758aab1028772 |
| publicationDate |
2010-09-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7791936-B2 |
| titleOfInvention |
Multibit electro-mechanical memory device and method of manufacturing the same |
| abstract |
A multibit electro-mechanical memory device and a method of manufacturing the same include a substrate, a bit line on the substrate; a lower word line and a trap site isolated from the bit line, a pad electrode isolated from a sidewall of the trap site and the lower word line and connected to the bit line, a cantilever electrode suspended over a lower void in an upper part of the trap site, and connected to the pad electrode and curved by an electrical field induced by a charge applied to the lower word line, a contact part for concentrating a charge induced from the cantilever electrode thereon in response to the charge applied from the lower word line and the trap site, the contact part protruding from an end part of the cantilever electrode, and an upper word line formed with an upper void above the cantilever electrode. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8693242-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008137404-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8222067-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9076618-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8188554-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011230001-A1 |
| priorityDate |
2007-03-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |