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filingDate 2009-03-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2010-08-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-7782471-B2
titleOfInvention Optical method for the characterization of laterally-patterned samples in integrated circuits
abstract Disclosed is a method for characterizing a sample having a structure disposed on or within the sample, comprising the steps of applying a first pulse of light to a surface of the sample for creating a propagating strain pulse in the sample, applying a second pulse of light to the surface so that the second pulse of light interacts with the propagating strain pulse in the sample, sensing from a reflection of the second pulse a change in optical response of the sample, and relating a time of occurrence of the change in optical response to at least one dimension of the structure.
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