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publicationDate 2010-08-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-7768080-B2
titleOfInvention Multilayer dielectric
abstract An apparatus and method relating to a first inorganic dielectric layer having a first concentration of defects and a second inorganic dielectric layer in contact with a first layer and having a second lesser concentration of defects are disclosed.
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