http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7763522-B2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_51c401a2b37b4b31675e2bcdb359fc5b |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76224 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-76 |
| filingDate | 2007-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2010-07-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_85e508fc04030b205d2234917e3bfbc2 |
| publicationDate | 2010-07-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-7763522-B2 |
| titleOfInvention | Method of high density plasma gap-filling with minimization of gas phase nucleation |
| abstract | A method of high density plasma (HDP) gap-filling with a minimization of gas phase nucleation (GPN) is provided. The method includes providing a substrate having a trench in a reaction chamber. Next, a first deposition step is performed to partially fill a dielectric material in the trench. Then, an etch step is performed to partially remove the dielectric material in the trench. Thereafter, a second deposition step is performed to partially fill the dielectric material in the trench. A reaction gas used in the second deposition step includes a carrier gas, an oxygen-containing gas, a silicon-containing gas, and a hydrogen-containing gas. After the carrier gas and oxygen-containing gas are introduced into the reaction chamber and a radio frequency (RF) power is turned on for a period of time, the silicon-containing gas and hydrogen-containing gas are introduced into the reaction chamber. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010055926-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7955948-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011230061-A1 |
| priorityDate | 2007-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 67.