| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e3d4f8755774a1707e2cdcf3abf43994 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-12174 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F11-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F11-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F17-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F11-00 |
| filingDate |
2007-01-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2010-07-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4fa509c7633019fcc7c8554d366e7261
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5780a8d9743167086747422f30af9a9b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_60533b6a26623b50a15f5cf7ab7d3b13
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_76f437bd6091f39bd77b299068346186
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4ee98cc49888e3b5de39de1ea9722245
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0eb5644301e6ba6fc9b663687855a7aa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_41d0ef342cd98eec0a1cc2fcad50e7eb |
| publicationDate |
2010-07-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7754908-B2 |
| titleOfInvention |
Tungsten and molybdenum compounds and their use for chemical vapour deposition (CVD) |
| abstract |
The present invention relates to specific novel tungsten and molybdenum compounds n nto the use thereof for the deposition of tungsten- or molybdenum-containing layers by means of chemical vapour deposition, and to the tungsten- or molybdenum-containing layers produced by this process. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2013046155-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11062940-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11746121-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9637395-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9109281-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9206507-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8859417-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10900119-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10361118-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200099003-A |
| priorityDate |
2006-01-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |