| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e778aa5db20ae5f57ed5e9e9e4962bd6 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-26 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-26 |
| filingDate |
2006-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2010-07-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_01b5f9ab1734d31c26d4de42501353a5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a6a7b4a522357636aa81082695265e68
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4f8a9eb15c04b5f40ffe671767065de3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_35191562f45c5c84b69b08eb83737209
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c01952614141daac5e20f40b23a05448 |
| publicationDate |
2010-07-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7749564-B2 |
| titleOfInvention |
Method and apparatus for the production of thin film coatings |
| abstract |
The present disclosure provides a method for producing a coating. The method may include providing a substrate material and initiating a coating-deposition process to apply a coating material to the substrate material to produce a coating on the substrate material, wherein the coating includes a diamond-like carbon coating. The method may further include monitoring an intensity of hydrogen-alpha emission of a plasma produced during the coating-deposition process and adjusting at least one process variable of the coating-deposition process to facilitate production of the diamond-like carbon coating. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/RU-194689-U1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/RU-194967-U1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11464303-B2 |
| priorityDate |
2005-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |