http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7745238-B2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0e433c1625fc509a087c912b440da84b |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-10 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate | 2008-02-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2010-06-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_363f9d42b211b1b677093bd3e2c48c8a http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_25f8b8bc11982c3c20c1a72219fccde8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7476e751f6a065b0995e46c3590705a3 |
| publicationDate | 2010-06-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-7745238-B2 |
| titleOfInvention | Monitoring of temperature variation across wafers during processing |
| abstract | A method of measuring temperature across wafers during semiconductor processing includes the step of providing a correlation between a peak wafer temperature during a processing step and a change in wafer surface charge or surface potential following the processing step. A first wafer to be characterized for its peak temperature spatial distribution during the processing step is processed through the processing step. The wafer surface charge or surface potential at a plurality of locations on the first wafer are measured following the processing step. A peak temperature spatial distribution for the first wafer is then determined based on the correlation and the wafer surface charge or surface potential measured in the measuring step. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106571320-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106571320-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9779931-B2 |
| priorityDate | 2008-02-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 22.