| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6b822ee046eb6c45d1e3bd9ce9c1782e |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1214
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-115 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1266
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B3-001
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-00 |
| filingDate |
2007-03-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2010-06-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_93019fb63551ffd28d085a735ed9ca45
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f4d69424e1f0fba17c5cd555a6046ac5 |
| publicationDate |
2010-06-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7741687-B2 |
| titleOfInvention |
Microstructure, semiconductor device, and manufacturing method of the microstructure |
| abstract |
A microstructure includes a first structural layer and a second structural layer which faces the first structural layer with a space interposed therebetween and is partially fixed to the first structural layer. At least one of the first structural layer and the second structural layer can be displaced. Further, opposed surfaces of the first structural layer and the second structural layer are different in roughness. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9960116-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009197061-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8043950-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8287943-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8629445-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8624336-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007093045-A1 |
| priorityDate |
2006-03-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |