| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_51d028c578ae85cb937b5b34a5129fbc |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32134
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66545 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 |
| filingDate |
2006-08-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2010-06-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d9533fedfa942e22bdb49bb448bf9d71
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ee2ce5444b0189db86968f4be9c06ed9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_74b593d93367e812acae50a26a4ae96c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5e2175c9219bbc793c8dde3f525f64c3 |
| publicationDate |
2010-06-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7741230-B2 |
| titleOfInvention |
Highly-selective metal etchants |
| abstract |
A highly selective metal wet etchant with an active ingredient comprising one or more types of molecules having two or more oxygen atoms is described. In one embodiment, the wet etchant is utilized to pattern a metal layer in a semiconductor structure. In another embodiment, a highly selective metal wet etchant with an active ingredient comprising one or more types of molecules having two or more oxygen atoms is used to pattern a metal gate electrode in a replacement gate processing scheme. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8399952-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7939442-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8222158-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9012322-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010258903-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9831100-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011006300-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013344692-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8791003-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9123785-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9330937-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8519454-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011210423-A1 |
| priorityDate |
2006-08-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |