| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-60 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-92 |
| filingDate |
2006-05-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2010-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3fb480530eb16f24ff2400352d61ed51
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5c441f079e042d2447a8a18e760608c5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_305f8035aeb2a6c4fb7857bd53a74133
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b1d9507953b127c92f41a46caafe9356
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_715ad765b4e535000bbd3c65a82c990e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1183aee0df68faa3344b352415bc9b72 |
| publicationDate |
2010-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7728372-B2 |
| titleOfInvention |
Method and structure for creation of a metal insulator metal capacitor |
| abstract |
The invention is directed to an improved capacitor that reduces edge defects and prevents yield failures. A first embodiment of the invention comprises a protective layer adjacent an interface of a conductive layer with the insulator, while the second embodiment of the invention comprises a protective layer on an insulator which is on a conductive layer. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9048212-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9679960-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9368567-B2 |
| priorityDate |
2006-05-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |