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publicationDate 2010-05-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-7722720-B2
titleOfInvention Delivery device
abstract Delivery devices for delivering solid precursor compounds in the vapor phase to reactors are provided. Such devices include a precursor composition of a solid precursor compound with a layer of packing material disposed thereon. Also provided are methods for transporting a carrier gas saturated with the precursor compound for delivery into such CVD reactors.
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