Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_23a4e0c875bf1ac2b8a3b76517de6c7d |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01Q40-00 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B3-30 |
filingDate |
2008-03-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2010-05-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_af52baaf8d6cb7f6c9a58ca099a88342 |
publicationDate |
2010-05-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-7721587-B2 |
titleOfInvention |
System and method for improving the precision of nanoscale force and displacement measurements |
abstract |
An apparatus and method for improving the precision of nanoscale force and/or displacement measurements using electro micro metrology (EMM). |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9304072-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9404841-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012266666-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9335240-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104684841-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10184851-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9408555-B2 |
priorityDate |
2007-03-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |