| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2fadcae3196ca725b795713aa49cd9f1 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-0149 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y30-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82B3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00031 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 |
| filingDate |
2008-09-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2010-05-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5d61cd54260ab20040f3d51d60105037
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e741cfdf58a72ac85d2ab3a96aaeae45 |
| publicationDate |
2010-05-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7713753-B2 |
| titleOfInvention |
Dual-level self-assembled patterning method and apparatus fabricated using the method |
| abstract |
A method of fabricating a device includes: providing a substrate having a patterned surface, depositing a first-level self-assembled material on at least a portion of the patterned surface, wherein the position and/or orientation of the first-level self-assembled material is directed by the patterned surface, to form a first nanostructure pattern, and depositing a second-level self-assembled material on at least a portion of the first nanostructure pattern to form an array of nanostructures of the second-level self-assembled material. An apparatus fabricated using the method is also provided. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9466324-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9159558-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8399334-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9964855-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8771529-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011309323-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9437452-B2 |
| priorityDate |
2008-09-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |