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publicationDate 2010-05-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-7709795-B2
titleOfInvention Infrared sensor unit and process of fabricating the same
abstract An infrared sensor unit has a thermal infrared sensor and an associated semiconductor device commonly developed on a semiconductor substrate. A dielectric top layer covers the substrate to conceal the semiconductor device formed in the top surface of the substrate. The thermal infrared sensor carried on a sensor mount which is supported above the semiconductor device by means of a thermal insulation support. The sensor mount and the support are made of a porous material which is superimposed on top of the dielectric top layer.
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