| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1721d75f5bf603447ec5a26b5c1c0be0 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S438-955
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S438-94 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76894
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76838 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3205 |
| filingDate |
2006-08-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2010-05-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f61a18820b5b92013cd705ca6ebd399b |
| publicationDate |
2010-05-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7709378-B2 |
| titleOfInvention |
Method and apparatus for processing thin metal layers |
| abstract |
A method and apparatus for processing a thin metal layer on a substrate to control the grain size, grain shape, and grain boundary location and orientation in the metal layer by irradiating the metal layer with a first excimer laser pulse having an intensity pattern defined by a mask to have shadow regions and beamlets. Each region of the metal layer overlapped by a beamlet is melted throughout its entire thickness, and each region of the metal layer overlapped by a shadow region remains at least partially unmelted. After completion of resolidification of the melted regions following irradiation by the first excimer laser pulse, the metal layer is irradiated by a second excimer laser pulse having a shifted intensity pattern so that the shadow regions overlap regions of the metal layer having fewer and larger grains. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008035863-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9466402-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8614471-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8871022-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7964480-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010291760-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8445365-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011248278-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9646831-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8715412-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009242805-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8415670-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8557040-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8802580-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8734584-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010270557-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8426296-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7964453-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9012309-B2 |
| priorityDate |
2000-10-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |