| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-123
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-122 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0382 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate |
2006-04-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2010-05-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3a5e27cb33dcee3594a1877478857e98 |
| publicationDate |
2010-05-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7709179-B2 |
| titleOfInvention |
Negative resist composition and method for forming resist pattern |
| abstract |
A chemically amplified negative resist composition is provided in addition to a method of forming a resist pattern from which a desirable pattern shape can be obtained. A negative resist composition in which a resin component (A) contains a resin component (A1) having a structural unit (a1) containing an alicyclic group having a fluorinated hydroxyalkyl group and a structural unit (a2) derived from an acrylic acid ester and containing a hydroxyl group-containing alicyclic group; and an acid generator component (B) contains an acid generator (B1) expressed by the following general formula (B1): n n(where R 51 represents a straight chain, branched chain or cyclic alkyl group or a fluorinated alkyl group; R 52 represents a hydrogen atom, hydroxyl group, halogen atom, straight chain, branched chain or cyclic alkyl group, straight chain or branched chain halogenated alkyl group, or straight chain or branched chain alkoxy group; R 53 represents an aryl group which may have a substituent; and n represents an integer of 1 to 3). |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10947579-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11081209-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10526641-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11600361-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9910955-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10825553-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7914968-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10529443-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10089437-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10975417-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10457934-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9411930-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9715573-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010304289-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10318706-B2 |
| priorityDate |
2005-04-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |