| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e777e0fb338ac4ff2b5b517d9226e365 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B2290-70
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B2290-50 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-8422
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B9-02088
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B9-02084
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-70625
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B9-02057
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-0675
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B9-0209 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-02 |
| filingDate |
2008-01-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2010-03-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e6edd68aa31b3e93f7aa82c2a73f65bf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f1343a8329dda13426f89e4ea1457050
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dc9797cfced5bbde4e34670252a7852b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ed01ad0fb0c7d2a09d857145e5e02efd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0201155bdccf3334b60e76e5c8fa47dd |
| publicationDate |
2010-03-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7684049-B2 |
| titleOfInvention |
Interferometer and method for measuring characteristics of optically unresolved surface features |
| abstract |
Disclosed is an interferometry analysis method that includes comparing information derivable from multiple interferometry signals corresponding to different surface locations of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parameterized by a series of characteristics that relate to one or more under-resolved lateral features of the test object; and outputting information about the under-resolved surface feature based on the comparison. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9710903-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9696264-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8818754-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7952724-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010265516-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017067729-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7948636-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010134786-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012271591-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11090760-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011229015-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011276935-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9311700-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8917901-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012250830-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8379800-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10533833-B2 |
| priorityDate |
2003-03-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |