http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7682030-B2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fdad00677b9268c26e005a9e03a7b9dd http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fa889b9f1b115813ce6dc7b3abb700f0 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B26-0825 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B7-188 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B26-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B26-08 |
| filingDate | 2008-02-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2010-03-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6968ea9fa4533f53dd4a2bab1bd45f39 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3118ed9749fca62cba4e4c9576fe93c1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bc30ca91418553c523e0991b40784ed0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b685bff59833565d19ad05dc728bb0d1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_41598da40a008c5cbd43cb4533c58b55 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_98aaa245a22792a17a37dbd8cd8ba33b |
| publicationDate | 2010-03-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-7682030-B2 |
| titleOfInvention | Deformable mirror apparatus |
| abstract | It is made possible to provide a deformable mirror apparatus which is deformable to a complicated shape (high-order shape). A deformable mirror apparatus includes: a substrate; a plurality of electrodes provided on the substrate; a spacer fixed above the substrate, having a first opening passing through from a first face of the spacer facing to the substrate to a second face of the spacer facing opposite from the first face, surrounding the electrodes, and having a step on the second face; a drive part including a membrane part disposed so as to cover the step of the spacer and so as to be opposed to the electrodes, a casing part having an opening at a bottom face of which the membrane part is exposed and supporting the membrane part, and a reflection film provided on the membrane part; and a voltage generator configured to generate predetermined voltage patterns on the electrodes, respectively. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009180172-A1 |
| priorityDate | 2007-03-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 25.