| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_38ed56a4b4e8e2315b2b3308bffedb3f |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2884
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-34 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate |
2007-06-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2010-03-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ca7bfaed033249d97f3ec06d02a76b8d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f8cb7abe7e5595de16ae3e5eb8b7fa40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e4226267552a56386e228d311afc687f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0cfed637a530946777b3d133ea05f10a |
| publicationDate |
2010-03-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7679384-B2 |
| titleOfInvention |
Parametric testline with increased test pattern areas |
| abstract |
An integrated circuit parametric testline providing increased test pattern areas is disclosed. The testline comprises a dielectric layer over a substrate, a plurality of probe pads over the dielectric layer, and a first device under test (DUT) formed in the testline in a space underlying the probe pads. The testline may also include a second DUT, which is formed in a space underlying the probe pads overlying the first DUT in an overlaying configuration. The testline may further include a polygon shaped probe pad structure providing an increased test pattern area between adjacent probe pads. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8482131-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010088655-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11670555-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022077007-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8051394-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013026647-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8895409-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11694936-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8217394-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008277659-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8519513-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8237160-B2 |
| priorityDate |
2007-06-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |