| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c5e4355421dcc38e5182a959b93e3b70 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J2367-02 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08J7-123
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-04 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08J7-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05C7-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05B7-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-511
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-04 |
| filingDate |
2000-04-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2010-03-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cbf96696915a5e7e7183b603ab7364c2 |
| publicationDate |
2010-03-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7670453-B1 |
| titleOfInvention |
Device for treating a container with microwave plasma |
| abstract |
A device for treating with microwave plasma a container. The container is placed in a chamber ( 12 ) made of a conductive material and is rotationally symmetrical, and the device includes a wave guide tunnel ( 15 ) substantially perpendicular to the axis (A 1 ) of the chamber and which emerges therein in the form of a rectangular window whereof the smaller dimension corresponds to its dimension along the chamber axis. The internal diameter of the chamber ( 12 ) is such that the microwaves are propagated in the chamber mainly according to a mode whereby the electric field resulting from the propagation of the microwaves exhibit an axial rotational symmetry. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007246472-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10081864-B2 |
| priorityDate |
1999-04-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |