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publicationNumber US-7649632-B2
titleOfInvention Characterization of micro- and nano scale materials by acoustic wave generation with a CW modulated laser
abstract Apparatus for analyzing thin surface layers. An acoustic wave generating laser beam is amplitude modulated with continuous wave modulation of a frequency in the megahertz to gigahertz range and an optical system directs the modulated radiation to a surface of a thin surface layer. This in turn causes an acoustic wave that is sensed and analyzed to provide an indication of properties of thin surface layer.
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