| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_88fc7f9eb617072238851d46591a0c76 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2875
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-14 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate |
2008-11-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2010-01-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bb7036808c724e47d565ee5017da9f4d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_78ea6930eb3a7d746537a79e676d3f76
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a67d9883edf0cfc8a5ab0f6de2ab18d6 |
| publicationDate |
2010-01-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7649377-B2 |
| titleOfInvention |
Test structure |
| abstract |
A wafer level test structure in which, a heating plate is formed on the wafer for heating a structure to be tested positioned above or adjacent to the heating plate. The heating plate produces heat by electrically connecting to a current. Thus, the heat provided by the heating plate and the electric input/output into/from the structure to be tested are controlled separately and not influenced each other. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8299809-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10109335-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017229163-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011068813-A1 |
| priorityDate |
2007-07-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |