| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4d72711e97d894c55af805c9de2053ab |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24355 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-22 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24D99-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B49-00 |
| filingDate |
2007-08-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2009-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a1faf849005d1c45f064c5c3e53129e7 |
| publicationDate |
2009-12-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7635290-B2 |
| titleOfInvention |
Interpenetrating network for chemical mechanical polishing |
| abstract |
Chemical mechanical polishing pads are provided, wherein the chemical mechanical polishing pads have a polishing layer comprising an interpenetrating network including a continuous non-fugitive phase and a substantially co-continuous fugitive phase. Also provided are methods of making the chemical mechanical polishing pads and for using them to polish substrates. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012220195-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8894799-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011287698-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11524384-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9108291-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8801949-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11471999-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11772229-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11446788-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11745302-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11685014-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11724362-B2 |
| priorityDate |
2007-08-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |