| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1e70c0aeade92d7571d955d3b90ea06e |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45553
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28562
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D207-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D401-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F1-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C211-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23B9-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-00 |
| filingDate |
2005-07-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2009-11-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b9ffab0da9ef3c91a386456da0b567bd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_47e2d789fc0a5646df1d44ab7b1846b5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1b0847af0f3e101e168f4e97376223e8 |
| publicationDate |
2009-11-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7619107-B2 |
| titleOfInvention |
Copper (II) complexes for deposition of copper films by atomic layer deposition |
| abstract |
The present invention relates to novel 1,3-diimines and 1,3-diimine copper complexes and the use of 1,3-diimine copper complexes for the deposition of copper on substrates or in or on porous solids in an atomic layer deposition process. |
| priorityDate |
2004-07-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |