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publicationDate 2009-09-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-7594328-B2
titleOfInvention Method of forming a slotted substrate with partially patterned layers
abstract A method of forming a slotted substrate that includes patterning a thin film over a substrate so that at least a portion of the substrate within a slot region is not covered by the thin film. In addition, a slot is formed in the substrate through the slot region that extends through the substrate and the thin film, wherein a chip count in a shelf surrounding the slot is minimized when the slot is formed in the substrate through the thin film in the slot region.
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