| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_51d028c578ae85cb937b5b34a5129fbc |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-785
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76838 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31111
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3081 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-308
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-4763
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-461 |
| filingDate |
2004-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2009-08-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d5b67e2da97fd009230a32fc81892613
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7d95a0836f45847d80b1b7929e79736a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_20dbd770c18daaadc0898fcaa5808f41
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_09ea67f852809d6bc9a9a259c2d25fd0 |
| publicationDate |
2009-08-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7579280-B2 |
| titleOfInvention |
Method of patterning a film |
| abstract |
A method of patterning a thin film. The method includes forming a mask on a film to be patterned. The film is then etched in alignment with the mask to form a patterned film having a pair of laterally opposite sidewalls. A protective layer is formed on the pair of laterally opposite sidewalls. Next, the mask is removed from above the patterned film. After removing the mask from the patterned film, the protective layer is removed from the sidewalls. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011163355-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011165738-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8304817-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10115725-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8293625-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10002966-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8389347-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8062938-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010151645-A1 |
| priorityDate |
2004-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |