| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fd446fb0d73aa96d044fea2eaa3c8ebc |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2203-0307 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00126
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B3-0054 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01P15-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L-
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-01
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-84
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-82
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B3-00 |
| filingDate |
2008-01-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2009-08-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_047e3fc1baebb9c84fa190edff16b88f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bf7b960d8723d564c44efe2d8221bc08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3fe243c39ac8511a357cc8acc8907db5 |
| publicationDate |
2009-08-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7579206-B2 |
| titleOfInvention |
Anchors for microelectromechanical systems having an SOI substrate, and method of fabricating same |
| abstract |
There are many inventions described and illustrated herein. In one aspect, the present invention is directed to a MEMS device, and technique of fabricating or manufacturing a MEMS device having mechanical structures and anchors to secure the mechanical structures to the substrate. The anchors of the present invention are comprised of a material that is relatively unaffected by the release processes of the mechanical structures. In this regard, the etch release process are selective or preferential to the material(s) securing the mechanical structures in relation to the material comprising the anchors. Moreover, the anchors of the present invention are secured to the substrate in such a manner that removal of the insulation layer has little to no affect on the anchoring of the mechanical structures to the substrate. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11469259-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9443883-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9040425-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018130829-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019088690-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8877648-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10522575-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021167100-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010248484-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10163945-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015079783-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10943931-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017133412-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9899432-B2 |
| priorityDate |
2003-07-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |