| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B12-318
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B12-315 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L28-91
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B12-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B12-033 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8242
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-108 |
| filingDate |
2006-08-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2009-08-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_252cfe5764c05aff7f26560b2464b1df
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0ae1ccd1dff0210af08c077fdf9960bc |
| publicationDate |
2009-08-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7575971-B2 |
| titleOfInvention |
Semiconductor device having a capacitor with a stepped cylindrical structure and method of manufacturing the same |
| abstract |
According to some embodiments, a capacitor includes a storage conductive pattern, a storage electrode having a complementary member enclosing a storage conductive pattern so as to complement an etch loss of the storage electrode, a dielectric layer disposed on the storage electrode, and a plate electrode disposed on the dielectric layer. Because the complementary member compensates for the etch loss of the storage electrode during several etching processes, the deterioration of the structural stability of the storage electrode may be prevented. Additionally, because the complementary member is formed on an upper portion of the storage electrode, the storage electrode may have a sufficient thickness to enhance the electrical characteristics of the capacitor that includes the storage electrode. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014065785-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9240441-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103681676-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9647056-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012064680-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2012068283-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103681676-B |
| priorityDate |
2003-11-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |