| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c3a2f00e72ba6e4c09b6da573427fbed |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02175
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28556
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02197 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0228
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C251-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F5-003
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3141
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F3-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-44 |
| filingDate |
2005-06-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2009-08-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cf0bd3b888b299e20c9fe97cd5d93b33
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_22bdbf713a0b3b537edb1c2ad45010bb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_74b5436df44b68c4563c6e92365e2dd0 |
| publicationDate |
2009-08-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7572731-B2 |
| titleOfInvention |
Unsymmetrical ligand sources, reduced symmetry metal-containing compounds, and systems and methods including same |
| abstract |
The present invention provides metal-containing compounds that include at least one β-diketiminate ligand, and methods of making and using the same. In some embodiments, the metal-containing compounds are homoleptic complexes that include unsymmetrical β-diketiminate ligands. In other embodiments, the metal-containing compounds are heteroleptic complexes including at least one β-diketiminate ligand. The compounds can be used to deposit metal-containing layers using vapor deposition methods. Vapor deposition systems including the compounds are also provided. Sources for β-diketiminate ligands are also provided. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9234273-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10259836-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011071316-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8357784-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009275199-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008280455-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7709399-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8017184-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009127105-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009075488-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7837797-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010186668-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8188464-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7858523-B2 |
| priorityDate |
2005-06-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |