http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7570362-B2
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a7b097bfd3f350ed27ffa53e1f114d1a |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-43 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-553 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-55 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-41 |
filingDate | 2008-08-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2009-08-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fa2b041bd8229626ee3967a3df26ebbe http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ea4effc0bb26158ee8af15fe5bf722e1 |
publicationDate | 2009-08-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | US-7570362-B2 |
titleOfInvention | Optical measurement apparatus utilizing total reflection |
abstract | In optical measurement utilizing total reflection, various types of measurement are selectively performed. The invention provides an optical measurement apparatus using total reflection, including a light source, a measurement optical system, and a light detector. The measurement optical system is an infinity-corrected positive lens formed of an optical member having a planar surface orthogonal to an optical axis of the measurement optical system at a front focal position. One side of the optical axis of the measurement optical system is used as a projection optical system for radiating measurement light onto a specimen, and another side is used as a photometric optical system for acquiring reflected light from the specimen. The light source is disposed at an entrance pupil position on the projection optical system side or at a position conjugate to the entrance pupil position and moves in an entrance pupil plane or in a plane conjugate to the entrance pupil position, along a straight line orthogonal to the optical axis, while a distance from the optical axis is detected. The light detector is disposed at an exit pupil position on the photometric optical system side or at a position conjugate to the exit pupil position. The optical-measurement apparatus comprises a light-source changing unit configured to change the position or shape of the light source. |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010079772-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011261446-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8582203-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009097016-A1 |
priorityDate | 2007-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 22.