http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7564566-B2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e777e0fb338ac4ff2b5b517d9226e365 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B9-02087 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-8422 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B9-0209 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B9-02084 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-2441 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B9-02088 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B9-02 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B11-02 |
| filingDate | 2008-01-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2009-07-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0201155bdccf3334b60e76e5c8fa47dd |
| publicationDate | 2009-07-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-7564566-B2 |
| titleOfInvention | Method and system for analyzing low-coherence interferometry signals for information about thin film structures |
| abstract | Methods and systems are disclosed for analyzing a scanning interferometry signal. Steps include: providing a scanning interferometry signal produced by a scanning interferometer for a first location of a test object (e.g., a sample having a thin film); providing a model function of the scanning interferometry signal produced by the scanning interferometer, wherein the model function is parameterized by one or more parameter values; fitting the model function to the scanning interferometry signal for each of a series of shifts in scan position between the model function and the scanning interferometry signal by varying the parameter values; and determining information about the test object (e.g., a surface height or height profile, and/or a thickness or thickness profile for a thin film in the test object) at the first location based on the fitting. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8698891-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102010006749-B4 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014209987-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102010006749-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011095145-A1 |
| priorityDate | 2005-05-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 37.