Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6899391b2eafb04fc616a2d0b1c7c4e7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b051f9f7933c758e66f6ceda5c9fb2cc |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67069 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-60 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32431 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K1-008 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K1-206 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K35-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25F1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K35-268 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23G5-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116 |
classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K35-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K35-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23G5-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25F1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-60 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K1-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23H9-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-311 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B23K1-008 |
filingDate |
2004-04-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2009-07-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_56d293e7c36585e559a80367dfc92190 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8a0c5d1a2114aebb3a88518821e30ab7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b7f955b0577934bc1e3ac844e7f1ccbe http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fb08ad07eaec0405538307c331193f91 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8cdf5027744136d7fd3dbb1664814356 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bf9d535f7cb9a9b6e2ac1a0e1c422710 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e8003d9480756fd40a6ba146c967c2ba |
publicationDate |
2009-07-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-7563380-B2 |
titleOfInvention |
Electrode assembly for the removal of surface oxides by electron attachment |
abstract |
An apparatus and a method comprising same for removing metal oxides from a substrate surface are disclosed herein. In one particular embodiment, the apparatus comprises an electrode assembly that has a housing that is at least partially comprised of an insulating material and having an internal volume and at least one fluid inlet that is in fluid communication with the internal volume; a conductive base connected to the housing comprising a plurality of conductive tips that extend therefrom into a target area and a plurality of perforations that extend therethrough and are in fluid communication with the internal volume to allow for a passage of a gas mixture comprising a reducing gas. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011229377-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008149690-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8119016-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8593778-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8617352-B2 |
priorityDate |
2003-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |