| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_51d028c578ae85cb937b5b34a5129fbc |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-249953
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-31663
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-249978
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-249993
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B2457-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B2310-12 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76814
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B3-26 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B9-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B3-26 |
| filingDate |
2005-06-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2009-07-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_da6decb32287fd8923ab789a40a54d4e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_59088276e14dbbee6f71a02c3643aa51
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_de48713e5fc943f4ac64ad8ca8c923ce
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a02d3cd261229eff2d6acc643208a2fe
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_88bcbb96d7e470685a1420b417b4e0fb |
| publicationDate |
2009-07-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7560165-B2 |
| titleOfInvention |
Sealing porous dielectric materials |
| abstract |
Method and structure for minimizing the downsides associated with microelectronic device processing adjacent porous dielectric materials are disclosed. In particular, chemical protocols are disclosed wherein porous dielectric materials may besealed by attaching coupling agents to the surfaces of pores. The coupling agents may form all or part of caps on reactive groups in the dielectric surface or may crosslink to seal pores in the dielectric. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8415255-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008311752-A1 |
| priorityDate |
2003-12-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |