http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7550254-B2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0757 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate | 2007-04-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2009-06-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6d29f26086ba4589c556af186b1107af http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c544a8449a760236df86d767f02d7943 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0d29f0823005453f0bf0ff7f3d5dbd58 |
| publicationDate | 2009-06-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-7550254-B2 |
| titleOfInvention | Fluorinated silsesquioxane polymers and use thereof in lithographic photoresist compositions |
| abstract | Fluorocarbinol- and/or fluoroacid-functionalized silsesquioxane polymers and copolymers are provided. The polymers are substantially transparent to ultraviolet radiation (UV), i.e., radiation of a wavelength less than 365 nm and are also substantially transparent to deep ultraviolet radiation (DUV), i.e., radiation of a wavelength less than 250 nm, including 157 nm, 193 nm and 248 nm radiation, and are thus useful in single and bilayer, positive and negative, lithographic photoresist compositions, providing improved sensitivity and resolution. A process for using the composition to generate resist images on a substrate is also provided, i.e., in the manufacture of integrated circuits or the like. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8999625-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8999623-B2 |
| priorityDate | 2000-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 222.