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publicationDate 2009-06-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-7547636-B2
titleOfInvention Pulsed ultra-high aspect ratio dielectric etch
abstract A method for selectively etching an ultra high aspect ratio feature dielectric layer through a carbon based mask in an etch chamber is provided. A flow of an etch gas is provided, comprising a fluorocarbon containing molecule and an oxygen containing molecule to the etch chamber. A pulsed bias RF signal is provided. An energizing RF signal is provided to transform the etch gas to a plasma.
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