| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d54adcccfe94ca903946779172afb5d6 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B26-001
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-1013
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-1032
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-02327
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J3-0256
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-02966
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J3-26 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J3-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B26-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-14 |
| filingDate |
2003-08-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2009-06-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9794941dbfa1fabbbde487210a386cd9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9648e8819ea7215ba79d5388674bb6cb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_be60191bfa430a01b86e9f2c18b19727
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4a5ded886a1887c18b28d2dcbcc63b37
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3486eeb8a76ff50aa1eb7e0b352ac78f |
| publicationDate |
2009-06-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7541584-B2 |
| titleOfInvention |
Resonant cavity enhanced device and a method for fabricating same |
| abstract |
A detector device for detecting incident radiation at particular wavelengths is disclosed. The device includes a base layer comprising a substrate. A resonant cavity is formed on the base layer between a pair of reflectors. One reflector is formed by a first reflector layer disposed in fixed relationship with respect to the base layer and the other reflector is formed by a second reflector layer disposed on a membrane in substantially parallel relationship to the substrate. A detector is provided within the cavity to absorb incident radiation therein for detection purposes. By placing the absorbing layer of the detector within the resonant cavity, high quantum efficiency can be achieved using very thin absorbing layers, thus significantly reducing the detector volume and hence noise. Various different arrangements of the detector device and different methods of fabricating the same are also disclosed. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010027010-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9865640-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017221941-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8624336-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7961335-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9536917-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10520365-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007093045-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019078938-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8043950-B2 |
| priorityDate |
2002-08-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |