| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6b822ee046eb6c45d1e3bd9ce9c1782e |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24421 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66757
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66765
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-42384
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-41733 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-84
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-288
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-285
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-445 |
| filingDate |
2006-04-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2009-05-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ae7f3304cfdb2f1624d6568ef58c7401 |
| publicationDate |
2009-05-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7537976-B2 |
| titleOfInvention |
Manufacturing method of thin film transistor |
| abstract |
The invention provides a manufacturing method of a circular thin film transistor of which shape is more controlled than the conventional case, while simplifying the steps and reducing the manufacturing time and cost by forming a circular thin film transistor by a maskless process such as a droplet discharge method. In the invention, a circular thin film transistor having a circular electrode is formed by stacking concentric circular thin films over a substrate by a maskless process such as a droplet discharge method. Moreover, a circular thin film transistor having a circular semiconductor layer may be formed by stacking concentric circular thin films over a substrate by a maskless process such as a droplet discharge method. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9647131-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009236600-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11581439-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8618544-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9899533-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9773916-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9865744-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11107396-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7977682-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010163895-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9093543-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9153702-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10310348-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9112037-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8872179-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7923800-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8624321-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9136391-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008156368-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10235163-B2 |
| priorityDate |
2005-05-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |