| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8cf8d77ac0eff1767b22d2fb9445b64d |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S134-902 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67028
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67034
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67051
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 |
| filingDate |
2004-04-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2009-04-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eed58cf7a76f87e446ffd87f5714b845 |
| publicationDate |
2009-04-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7513262-B2 |
| titleOfInvention |
Substrate meniscus interface and methods for operation |
| abstract |
An apparatus for processing a substrate with a fluid meniscus to be applied to a surface of the substrate is provided which includes a docking surface configured to be placed adjacent to an edge of the substrate where the docking surface is in the same plane as the substrate. The docking surface provides a transition interface to allow the fluid meniscus to enter and exit the surface of the substrate. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9177762-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9111729-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10283325-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011132874-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9190289-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9967965-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8322045-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9449793-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9911578-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9155181-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9735020-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8999104-B2 |
| priorityDate |
2002-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |