| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bb4ee28d43b5e8d4a3c5141fa9bcfeb0 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L79-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L77-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L27-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G73-101
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L101-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L101-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L79-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G73-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L1-00 |
| filingDate |
2002-12-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2009-02-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ae5746722e3d3c981f5dfc1c595f82fb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a33a76e9a05a7a3c0063a06e2afe4f58
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_58e6266ae028b7cd6850372f6996d4cb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e3b08b326df0fb8dedc7e284db05c11f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a258a3bfcb186c29245e08a4074059f2 |
| publicationDate |
2009-02-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7495046-B2 |
| titleOfInvention |
Crosslinkable elastomer composition and formed product comprising the same |
| abstract |
The present invention provides a crosslinkable elastomer composition, in which generation of HF under high temperature conditions is reduced, the decrease in weight to both NF 3 plasma treatment and O 3 treatment in the semiconductor manufacturing process is small and generation of foreign substances (particles) in these treatments is suppressed significantly. Specifically, the present invention relates to a crosslinkable elastomer composition comprising a crosslinkable elastomer and a filler having a specific surface area of at least 0.5 m 2 /g and containing a synthetic polymer having a thermally and chemically stable aromatic ring in the main chain, a crosslinkable elastomer composition comprising a crosslinkable elastomer and nonoxide ceramics and a crosslinkable elastomer composition wherein the decrease in weight by NF 3 plasma irradiation is at most 0.20%. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011083806-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9068057-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2312614-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006012125-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7765976-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010144948-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8211964-B2 |
| priorityDate |
2001-12-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |