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publicationDate 2009-02-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-7491783-B2
titleOfInvention Process for highly purified polyhedral oligomeric silsesquioxane monomers
abstract A synthesis process for polyhedral oligomeric silsesquioxanes that produces in high yield a low resin content, solvent free, and trace metal free monomer suitable for use in microelectronic applications. POSS silanols are reacted with a silane coupling agent in the presence of a solvent and a superbase.
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