| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9eedbff015f08c91bebf43f5047d9fe4 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-211
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-47
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2021-335 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-33
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J3-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J3-0232
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J3-0291
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J3-0286
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-9501
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J3-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-274
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-55
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J3-4531
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J3-021
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J3-0208
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J3-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J3-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J3-2823
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J3-2803
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J3-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J3-42 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-21
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-47 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J3-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J3-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J3-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-33
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N3-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-27
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J3-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-55 |
| filingDate |
2006-09-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2008-11-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_36d47f40d9bef0e07bdd07697bdce640 |
| publicationDate |
2008-11-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7446876-B2 |
| titleOfInvention |
Vacuum ultra-violet reflectometer with stray light correction |
| abstract |
A spectroscopy system is provided which is optimized for operation in the VUV region and capable of performing well in the DUV-NIR region. Additionally, the system incorporates an optical module which presents selectable sources and detectors optimized for use in the VUV and DUV-NIR. As well, the optical module provides common delivery and collection optics to enable measurements in both spectral regions to be collected using similar spot properties. The module also provides a means of quickly referencing measured data so as to ensure that highly repeatable results are achieved. The module further provides a controlled environment between the VUV source, sample chamber and VUV detector which acts to limit in a repeatable manner the absorption of VUV photons. The use of broad band data sets which encompass VUV wavelengths, in addition to the DUV-NIR wavelengths enables a greater variety of materials to be meaningfully characterized. Array based detection instrumentation may be exploited to permit the simultaneous collection of larger wavelength regions. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10401221-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7990549-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8054453-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8119991-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8867041-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9279722-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8565379-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8564780-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9752933-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010007885-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7940391-B2 |
| priorityDate |
2003-01-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |