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filingDate 2007-11-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2008-11-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ae81c17444bc70727268b0c504c71b26
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publicationDate 2008-11-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-7446362-B2
titleOfInvention Semiconductor memory device and method of manufacturing the same
abstract A semiconductor memory device includes a semiconductor substrate having a first region and a second region, a transistor placed in the first region of the semiconductor substrate, a first insulating film formed on the semiconductor substrate in the first and second regions and on the transistor, a first ferroelectric capacitor formed on the first insulating film in the first region and electrically connected to the transistor, a hydrogen barrier film formed above the first ferroelectric capacitor and above the first insulating film in the first and second regions, a first contact penetrating the hydrogen barrier film in the first region and electrically connected to the first ferroelectric capacitor, and a second contact which penetrates the hydrogen barrier film in the second region and which is in a floating state.
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7956395-B2
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