| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_51d028c578ae85cb937b5b34a5129fbc |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76898
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-15311
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-49822
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-05573
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-05571
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-00014
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01322
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-16227
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-16225 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-486
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-49827 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-00 |
| filingDate |
2006-03-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2008-10-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_548b06252daa40a80cfc575388b59b1d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d0257c94af7daeaab703d4cfc8156cb6 |
| publicationDate |
2008-10-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7443030-B2 |
| titleOfInvention |
Thin silicon based substrate |
| abstract |
Embodiments of the invention provide a device with a die and a substrate having a similar coefficient of thermal expansion to that of the die. The substrate may comprise a silicon base layer. Build up layers may be formed on the side of the base layer further from the die. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015028470-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009121346-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8030137-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9117808-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9070674-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10714359-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014035138-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10886022-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10446520-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011165735-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9024422-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10867949-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012193812-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8703534-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014225242-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7928550-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9312240-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11158614-B2 |
| priorityDate |
2004-10-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |