| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32082
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32165
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31122
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31144
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3266 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-469
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31 |
| filingDate |
2005-10-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2008-10-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cd44b6a5ee8133bc567dee4402c72c87
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_54da297c75cf50634cd2b78feb9a1272
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2fd2133cfc4bab2ebcab74f289488432
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7f5831425024dbe84d07da7f95304ed0 |
| publicationDate |
2008-10-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7432210-B2 |
| titleOfInvention |
Process to open carbon based hardmask |
| abstract |
A method of opening a carbon-based hardmask layer composed of amorphous carbon containing preferably at least 60% carbon and between 10 and 40% hydrogen. The hardmask is opened by plasma etching using an etching gas composed of H 2 , N 2 , and CO. The etching is preferably performed in a plasma etch reactor having an HF biased pedestal electrode and a capacitively VHF biased showerhead. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009087979-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010167506-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11264249-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8641828-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8298931-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8592321-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8926745-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012118204-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008286977-A1 |
| priorityDate |
2005-10-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |