| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e099f47b15a9baa6efaec4ad90cac6e9 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-4908
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-49007
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-49005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-49
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S439-936 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L9-0042
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L9-0055
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L9-008 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-113 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01L9-00 |
| filingDate |
2005-05-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2008-07-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_814ce3d27272443024019ebcb5d4d6ba
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_49f825856081d050e6948b0dff2f8d10 |
| publicationDate |
2008-07-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7404247-B2 |
| titleOfInvention |
Method for making a pressure sensor |
| abstract |
A method for making a pressure sensor including the steps of providing a substrate and forming or locating a pressure sensing component on the substrate. The method further includes the step of, after the forming or locating step, etching a cavity in the substrate below the pressure sensing component to define a diaphragm above the cavity with the pressure sensing component located on the diaphragm. The pressure sensing component includes an electrically conductive electron gas which changes its electrical resistance thereacross upon movement of the diaphragm. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9679779-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011214505-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9583354-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10477323-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011165719-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8567255-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7624644-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012248460-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9975765-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009056463-A1 |
| priorityDate |
2004-09-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |