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filingDate 2005-09-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2008-07-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-7399063-B2
titleOfInvention Micro-electromechanical fluid ejection device with through-wafer inlets and nozzle chambers
abstract A micro-electromechanical fluid ejection device includes a substrate. Drive circuitry is arranged on an outlet side of the substrate. A plurality of nozzle chambers and corresponding fluid inlets is etched into the substrate. A plurality of support structures is positioned on the substrate to cover respective nozzle chambers. Each support structure defines a fluid ejection nozzle in fluid communication with the respective nozzle chamber. A plurality of fluid ejecting members is arranged in respective support structures. The fluid ejecting members are displaceable into and out of the nozzle chambers to eject fluid from respective fluid ejection nozzles. A plurality of actuators is connected to the drive circuitry and to respective fluid ejecting members to displace respective fluid ejecting members into and out of each nozzle chamber on receipt of electrical signals from the drive circuitry to eject ink from each fluid ejection nozzle.
priorityDate 1998-06-09-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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